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Alert and abile microfabrication.
Die and mold of sensor parts Machining of R0.02 mm Circular arc
<Machining conditions> Cutting feed : 200 mm/min Tool used : 0.2 mm dia. end-mill Workpiece material : NAK80
Feed axis mechanism
- Feed axis : Adoption of ultra-precision rolling guideways
- Drive motors : XYZ-axes all feature linear motors.
- Positioning : Adoption of a 5-nm scale feedback system
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